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US 2015/0027375 A1Published application
Deposition source for deposition device
AssigneeSamsung Display Co., Ltd.
InventorYONG-JUN CHA
Life of this patent
Estimating the term…
Abstract
A deposition source for a deposition device includes a crucible. A heater is disposed outside of the crucible and the heater has a plate shape. The deposition source includes a heater guide. The heater is disposed within the heater guide, and the heater guide supports the heater. An external supporter is connected to the heater guide.
Claims20
A deposition source for a deposition device, comprising:
- a crucible;
- a heater disposed outside of the crucible, the heater having a plate shape;
- a heater guide, inside which the heater is disposed, the heater guide supports the heater;
- and
- an external supporter is connected to the heater guide.
2 more elements
A deposition source, comprising:
- an internal crucible coupled to an external crucible, wherein the external crucible is configured to surround an outside of the internal crucible;
- a heater disposed outside of the crucible, wherein the heater comprises a first heater unit and a second heater unit, and the heater is configured to generate heat and provide the generated heat to the internal crucible;
- a heater guide coupled to the internal crucible, wherein the heater guide comprises an insertion hole and a contact-preventing protrusion, the first heater unit and the second heater unit are disposed within the insertion hole and the contact-preventing guide is configured to maintain a separation between the first heater unit and the second heater unit;
- and
- a reflector configured to prevent the heat generated by the heater from being radiated or conducted outside of the deposition source.
2 more elements
Dependencies are inferred from the claim text.