Vapor deposition apparatus
AssigneeSamsung Display Co., Ltd.
InventorsJin-Kwang Kim, Seung-Yong Song, Myung-Soo Huh, Suk-Won Jung, Choel-Min Jang, Jae-Hyun Kim, Sung-Chul Kim
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Abstract
A vapor deposition apparatus for providing a deposition film on a substrate, the vapor deposition apparatus includes a plurality of first nozzle parts which injects a first raw material toward the substrate; a plurality of second nozzle parts which is alternately disposed together with the plurality of first nozzle parts and injects a second raw material toward the substrate; a diffuser unit which distributes the second raw material to the plurality of second nozzle parts; and a supply unit which supplies the second raw material to the diffuser unit.
Claims20
A vapor deposition apparatus which provides a deposition film on a substrate, the vapor deposition apparatus comprising:
- a plurality of first nozzle parts which injects a first raw material toward the substrate;
- a plurality of second nozzle parts which is alternately disposed with the plurality of first nozzle parts and injects a second raw material toward the substrate;
- a diffuser unit which distributes the second raw material to the plurality of second nozzle parts;
- and
- a supply unit which supplies the second raw material to the diffuser unit.
A vapor deposition apparatus which provides a deposition film on a substrate, the vapor deposition apparatus comprising:
- a deposition unit comprising a plurality of first nozzle parts which injects a first raw material toward the substrate and a plurality of second nozzle parts which is alternately disposed with the plurality of first nozzle parts and injects a second raw material toward the substrate;
- a diffuser unit which is coupled with the deposition unit and distributes the second raw material to the plurality of second nozzle parts;
- and
- a supply unit which supplies the second raw material to the diffuser unit,
- wherein the diffuser unit comprises an upper plate, a lower plate, and a plurality of distribution plates substantially parallel to one another between the upper plate and the lower plate, and
- wherein a plurality of slits corresponding to the plurality of second nozzle parts is defined in the lower plate.
Dependencies are inferred from the claim text.