Susceptor for securing semiconductor wafer
AssigneeSumitomo Electric Industries, Ltd.
InventorKazuhiko HORINO
Life of this patent
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Abstract
A susceptor for securing a semiconductor wafer with an orientation flat within a pocket is disclosed. The pocket provides a first inner wall extending along the orientation flat and a second wall facing an arched periphery of the semiconductor wafer. The first inner wall provides a hollow extending outwardly from the first inner wall, where the hollow accompanies with one of structures of a step, a slope, and a chamfered corner.
Claims20
A susceptor configured to set a semiconductor wafer thereon, the wafer having an orientation flat and an arched periphery, comprising:
- a pocket formed by a first inner wall and a second inner wall, the first inner wall facing the orientation flat of the semiconductor wafer, the second inner wall facing the arched periphery, the first inner wall having a hollow extending from the first inner wall outwardly,
- wherein the hollow provides a step with a height less than a thickness of the semiconductor wafer.
A susceptor configured to set a semiconductor wafer thereon, the wafer having an orientation flat and an arched periphery, comprising:
- a pocket formed by a first inner wall and a second inner wail, the first inner wall facing the orientation flat of the semiconductor wafer, the second inner wall facing the arched periphery, the first inner wall having a hollow extending from the first inner wall outwardly,
- wherein the hollow provides a slope inclined outwardly.
A susceptor configured to set a semiconductor wafer thereon, the wafer having an orientation flat and an arched periphery, comprising:
- a pocket formed by a first inner wall and a second inner wall, the first inner wall facing the orientation fiat of the semiconductor wafer, the second inner wall facing the arched periphery, the first inner wall having a hollow extending from the first inner wail outwardly,
- wherein the hollow provides a chamfer at a corner with respect to the first inner wall.
Dependencies are inferred from the claim text.