Mechanical Alignment Of Substrates To A Mask

A system for use during workpiece processing, comprising:

• a mask frame, comprising:
• an upper plate having apertures therein;
• and
• two or more vertical sidewalls extending from said upper plate to support said mask frame on a working surface;
• a plurality of masks, each of the masks comprising:
• a central portion having a pattern;
• one or more protrusions extending from an edge of said central portion;
• one or more mounting holes disposed in said one or more protrusions;
• and
• one or more kinematic features disposed in said one or more protrusions, each kinematic feature adapted to engage with a respective alignment pin disposed on said working surface;
• fasteners passing through said mounting holes and connecting to an underside of said upper plate, such that the central portion of each of said masks is aligned with a respective aperture in said upper plate, wherein each of said fasteners comprises a head having a diameter greater than a diameter of said mounting hole and a shaft having a diameter smaller than said diameter of said mounting hole, allowing each of said masks to move relative to said mask frame in two lateral directions.