Apparatus and method for producing solar cells with a heater apparatus
AssigneeTSMC Solar Ltd.
InventorsWei-Lun LU, Chun-Ying HUANG, Wen-Chin LEE
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AssigneeTSMC Solar Ltd.
InventorsWei-Lun LU, Chun-Ying HUANG, Wen-Chin LEE
Estimating the term…
A method and apparatus for forming a solar cell can include a heater apparatus having one or more heater elements in a deposition processing system, a front cover covering the one or more heater elements from a front side, and a back metal reflector mating with the front cover on a back side and enclosing the one or more heater elements. The method can include disposing a plurality of substrates about a plurality of surfaces of a substrate apparatus that is operatively coupled to sequentially feed a substrate within a vacuum chamber, forming an absorber layer over a surface of each one of the plurality of substrates and heating the surface of each one of the plurality of substrates with the heater apparatus as described above.
A heater apparatus for forming a solar cell, comprising:
A method of forming a solar cell, comprising:
An apparatus for forming a solar cell, comprising:
Dependencies are inferred from the claim text.