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US 2015/0020853 A1Published application
Cleaning apparatus
AssigneeDisco Corporation
InventorMakoto Maejima
Life of this patent
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Abstract
A cleaning apparatus including a holding table for holding a plate-shaped workpiece, a cleaning nozzle for spraying a cleaning fluid to the plate-shaped workpiece, and a table cover for covering a circumference of the holding table. The table cover includes a top plate for covering an upper side of the holding table and a side plate for covering the circumference of the holding table. The table cover is provided with a netlike mesh sheet spaced from a lower surface of the top plate and another netlike mesh sheet spaced from an inner surface of the side plate.
Claims2
A cleaning apparatus comprising:
- a holding table for holding a plate-shaped workpiece;
- a motor for rotating said holding table;
- a cleaning nozzle for spraying a cleaning fluid to said plate-shaped workpiece held on said holding table;
- and
- a cover for absorbing said cleaning fluid sprayed from said cleaning nozzle and scattered from said holding table holding said plate-shaped workpiece and rotating at a predetermined speed,
- said cover including a top plate having an opening for exposing an upper surface of said holding table and a side plate connected to said top plate so as to extend downward therefrom, said top plate being positioned above an upper surface of said plate-shaped workpiece held on said holding table,
- said side plate being provided with a netlike mesh sheet spaced from an inner surface of said side plate.
4 more elements
Dependencies are inferred from the claim text.