Structure for improved gas activation for cross-flow type thermal cvd chamber
OwnerZhiyuan YE, Mehmet Tugrul SAMIRinventors
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Abstract
Embodiments described herein generally relate to a processing apparatus having a preheat ring for preheating the process gas. The preheat ring is disposed on a ring support. The preheat ring may have a segment adjacent a process gas inlet. The segment includes a top surface, and the top surface includes features to increase the surface area. In one embodiment, the feature is a plurality of protrusions. In another embodiment, the feature is a plurality of linear fins. In another embodiment, the preheat ring includes a first sub ring and a second sub ring disposed on the first sub ring, wherein the features are located on one segment of the second sub ring.
Claims20
An apparatus for processing a substrate, comprising:
- a chamber body having a side wall and a bottom wall defining an interior processing region;
- a substrate support disposed in the interior processing region of the chamber body;
- a ring support;
- and
- a preheat ring disposed on the ring support, wherein the preheat ring comprises a plurality of fins disposed adjacent a process gas inlet.
An apparatus for processing a substrate, comprising:
- a chamber body having a side wall and a bottom wall defining an interior processing region;
- a substrate support disposed in the interior processing region of the chamber body;
- a ring support;
- a first sub ring disposed on the ring support;
- and
- a second sub ring disposed on the first sub ring.
An apparatus for processing a substrate, comprising:
- a chamber body having a side wall and a bottom wall defining an interior processing region;
- a substrate support disposed in the interior processing region of the chamber body;
- a ring support;
- and
- a preheat ring disposed on the ring support, wherein the preheat ring includes a segment disposed adjacent a process gas inlet, wherein the segment includes a top surface and a plurality of protrusions are disposed on the top surface.
Dependencies are inferred from the claim text.