Method for synthesis of Graphene Films With Large Area and High Throughput
OwnerXuesong Li, Jia-Hung Wu +1inventors
InventorsXuesong Li, Jia-Hung Wu, Hao Ning
Life of this patent
Estimating the term…
Abstract
Improved methods for synthesizing large area thin films are disclosed, which result in films of enhanced width. The methods comprise providing a separator material which is rolled or wound up, along with the metallic foil substrate on which the thin film is to be deposited, to form a coiled composite which is then subjected to conventional chemical vapor deposition. Optionally, a winding tool may be used to aid in the rolling process. The methods enable a many-fold increase in the effective width of the substrate to be achieved.
Claims10
In a method for synthesizing a thin film using chemical vapor deposition, said method comprising the steps of
- heating a substantially flat substrate, forming a thin film on a surface of said substrate by exposing the substrate to chemical vapor deposition, and cooling the substrate to room temperature, the improvement comprising, prior to said heating step, providing a separator material, positioning said separator material adjacent to and in a substantially overlying relationship with said substrate to form a composite, and winding said composite so as to provide a coiled substrate;
- wherein said separator material is comprised of a substance selected from the group consisting of fused quartz wool, ceramic insulation, a silica fabric, and a graphite foil.
Dependencies are inferred from the claim text.