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US 2014/0360267 A1Published application
Thermal convection type linear accelerometer
AssigneeChung Hua University
InventorJIUM MING LIN
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Abstract
A thermal convection type linear accelerometer includes a substrate and a first sensing device. The first sensing device includes two first temperature-sensing components and a first heater. The two first temperature-sensing components are disposed on the substrate. The first heater is disposed on the substrate. The first heater is located between the two first temperature-sensing components. The two first temperature-sensing components are higher than the first heater relative to the substrate.
Claims16
A thermal convection type linear accelerometer comprising:
- a substrate;
- and
- a first sensing device comprising:
- two first temperature-sensing components disposed on the substrate;
- and
- a first heater disposed on the substrate and between the two first temperature-sensing components, wherein a height of at least one of the two first temperature-sensing components relative to the substrate is greater than a height of the first heater relative to the substrate.
3 more elements
Dependencies are inferred from the claim text.