Micro-electro-mechanical-system resonant sensor and method of controlling the same

A method of controlling a MEMS resonant sensor using a mass body vibratable by an electrostatic force between a first driving electrode and a second driving electrode, the method comprising:

• generating an output signal corresponding to a vibration component of the mass body;
• generating a comparative voltage corresponding to the output signal by automatically controlling a gain of the output signal;
• adjusting a level of a bias voltage applied to the mass body by using a reference voltage and the comparative voltage;
• and
• controlling the electrostatic force by applying the adjusted bias voltage to the mass body.

A method of controlling a MEMS resonant sensor, comprising:

• applying a sinusoidal driving voltage to a first driving electrode and a second driving electrode;
• applying a bias voltage to a mass body which vibrates in a first direction between the first driving electrode and the second driving electrode by an electrostatic force;
• generating an output signal corresponding to a vibration component of the mass body;
• and
• determining a size of a physical quantity input from the outside in a second direction by detecting the output signal,
• wherein the applying the bias voltage to the mass body comprises:
• generating a comparative voltage corresponding to the output signal by automatically controlling a gain of the output signal;
• adjusting a level of the bias voltage applied to the mass body by using a reference voltage and the comparative voltage;
• and
• controlling the electrostatic force by applying the adjusted bias voltage to the mass body.