Microprobe and microprobe manufacturing method

A microprobe manufacturing method comprising:

• forming a first electrode on a surface of a base;
• forming a lever supported by the base;
• forming a parent body of a second electrode and a third electrode on the lever;
• forming a mask on a portion of the parent body corresponding to the third electrode;
• forming the second electrode by etching based on a difference between a material of the second electrode and a material of the mask;
• and
• removing the mask to form the third electrode,
• wherein the third electrode is formed to project from the second electrode in a first direction in a main surface of the lever and a width of the third electrode in a second direction perpendicular to the first direction in the main surface defines a width of an electrical contact area when a scanning operation is performed by use of the third electrode in a third direction perpendicular to the main surface.