Method and system for identifying a clean endpoint time for a chamber
AssigneeApplied Materials, Inc.
InventorsIlias Iliopoulos, Shuo Na, Jose Albor
Life of this patent
Estimating the term…
Abstract
Systems and methods are provided for determining a clean endpoint time for a current run of a chamber. The clean endpoint time for the current run may be determined by determining that a chamber parameter, such as a chamber pressure, has stabilized. Historical clean endpoint time data is updated by adding the clean endpoint time for the current run of the chamber. A recommended clean endpoint time is then determined for the chamber based on the updated historical clean endpoint time data.
Claims20
A method comprising:
- determining, by a processing device, a clean endpoint time for a current run of a chamber;
- updating, by the processing device, historical clean endpoint time data by adding the clean endpoint time for the current run of the chamber to the historical clean endpoint time data;
- and
- determining, by the processing device, a recommended clean endpoint time for the chamber based on the updated historical clean endpoint time data.
A system comprising:
- a memory to store historical clean endpoint time data;
- and
- a processing device, coupled to the memory, to:
- determine a clean endpoint time for a current run of a chamber;
- update the historical clean endpoint time data by adding the clean endpoint time for the current run of the chamber to the historical clean endpoint time data;
- and
- determine a recommended clean endpoint time for the chamber based on the updated historical clean endpoint time data.
A non-transitory computer-readable storage medium storing instructions which, when executed, cause a processing device to perform the operations of:
- determining, by a processing device, a clean endpoint time for a current run of a chamber;
- updating, by the processing device, historical clean endpoint time data by adding the clean endpoint time for the current run of the chamber to the historical clean endpoint time data;
- and
- determining, by the processing device, a recommended clean endpoint time for the chamber based on the updated historical clean endpoint time data.
Dependencies are inferred from the claim text.