Apparatus for transferring substrate, substrate processing system, method for transferring substrate and memory medium

A substrate processing system, comprising:

• a substrate transfer apparatus configured to load a plurality of substrates from outside;
• a substrate processing apparatus configured to treat the substrates loaded by the substrate transfer apparatus;
• and
• a delivery apparatus configured to deliver the substrates loaded by the substrate transfer apparatus to the substrate processing apparatus,
• wherein the substrate transfer apparatus includes a substrate transfer device configured to load and unload the plurality of substrates into and from a cassette configured to accommodate the plurality of substrates, a substrate detector device configured to detect positions of the substrates accommodated in the cassette, and a control device configured to control the substrate transfer device, the control device includes a computation component configured to calculate a shifted amount between a base position and the position of each of the substrates detected by the substrate detector device such that the shifted amount of an upward or downward shift from the base position is set as a positive value, a verification component configured to verify whether a difference between maximum and minimum values among the shifted amounts calculated by the computation component is equal to or less a threshold value, and a transfer control component configured to control the substrate transfer device such that the substrate transfer device unloads the substrates from the cassette when the verification component verifies that the difference between the maximum and minimum values is equal to or less than the threshold value.

A method for unloading substrates, comprising:

• detecting positions of a plurality of substrates accommodated in a cassette by a substrate detector device;
• calculating a shifted amount between a base position and the position of each of the substrates detected by the substrate detector device such that the shifted amount of an upward or downward shift from the base position is set as a positive value;
• verifying whether a difference between maximum and minimum values among the shifted amounts calculated by the computation component is equal to or less a threshold value;
• and
• controlling a substrate transfer device such that the substrate transfer device unloads the substrates from the cassette when the verification component verifies that the difference between the maximum and minimum values is equal to or less than the threshold value.