Apparatus and methods for photo-excitation processes

A method for depositing a layer on a substrate, comprising:

• flowing a fluid precursor radially across a surface of the substrate disposed within a processing chamber in a laminar manner so that the surface of the substrate is immersed in the fluid precursor;
• directing an electromagnetic radiation generated from a radiation source to a light scanning unit such that the electromagnetic radiation is deflected and scanned, in a predetermined shape of illumination, across the substrate at or near the surface upon which a material layer is to be formed;
• and
• initiating a deposition process with the electromagnetic radiation having a wavelength selected for photolytic dissociation of the fluid precursor to deposit the material layer onto the surface of the substrate.

A substrate processing chamber, comprising:

• a substrate support for supporting a substrate within the processing chamber;
• a gas supply providing a fluid precursor into the processing chamber;
• and
• a radiation source emitting an electromagnetic radiation to the fluid precursor at or near a surface of the substrate, the electromagnetic radiation having a wavelength and a power level selected for photolytic dissociation of the fluid precursor to deposit a material layer onto the surface of the substrate.