Annealing Method for Thin Film Electrodes
AssigneeApple Inc.
InventorsLili Huang, Richard M. Mank
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Abstract
A method of annealing a thin film deposited on a substrate. According to the method, the thin film deposited on the substrate is provided. The provided thin film is irradiated with electromagnetic radiation until a predetermined crystal quality of the thin film is achieved. The spectral band of the electromagnetic radiation is selected such that the thin film is substantially absorptive to the electromagnetic radiation and the substrate is substantially transparent to the electromagnetic radiation.
Claims20
A method of annealing a thin film deposited on a substrate, the method comprising:
- providing the thin film deposited on the substrate;
- irradiating the thin film with electromagnetic radiation until a predetermined crystal quality of the thin film is achieved, a spectral band of the electromagnetic radiation selected such that the thin film is substantially absorptive to the electromagnetic radiation and the substrate is substantially transparent to the electromagnetic radiation.
A method of annealing a thin film deposited on a substrate, the method comprising:
- providing the thin film deposited on the substrate, the thin film having a film electrical conductivity that is greater than a substrate electrical conductivity of the substrate;
- passing an electrical current through the thin film to heat the thin film to an annealing temperature.
A method of annealing a cathode of a thin film battery, the method comprising:
- providing the thin film battery, the thin film battery including:
- a substrate;
- the cathode deposited on the substrate;
- an electrolyte layer formed on the cathode;
- and
- an anode formed on the electrolyte layer;
- heating the cathode to an annealing temperature;
- and
- limiting a temperature increase of the substrate, the electrolyte layer, and the anode during annealing of the cathode.
Dependencies are inferred from the claim text.