Deposition injection masking

A block mask set usable with a deposition device, the deposition device comprising:

• a deposition chamber,
• a substrate stage positioning a substrate within the deposition chamber, a precursor source controllably injecting a precursor into the deposition chamber, and
• a block plate comprising block plate apertures directing injection of the precursor at the substrate,
• the block mask set comprising:
• at least one block mask comprising masking apertures and positioned to cover a zone of the block plate with an alignment of the masking apertures and the block plate apertures to alter directing the injection of the precursor at the substrate.

A method of exposing a substrate to a precursor in a deposition device comprising:

• a precursor source storing a precursor;
• a block plate comprising block plate apertures directing injection of the precursor at the substrate;
• and
• at least one block mask comprising masking apertures and positioned to cover a zone of the block plate,
• the method comprising:
• positioning respective block masks over the zone of the block plate to achieve a selected alignment of the masking apertures and the block plate apertures;
• and
• injecting the precursor from the precursor source through the masking apertures and exposed block plate apertures toward the substrate.