Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturing

A method of transporting substrates within an electronic device processing system, comprising:

• providing a mainframe housing including a transfer chamber, a first facet, a second facet opposite the first facet, a third facet, and a fourth facet opposite the third facet;
• providing a first carousel assembly coupled to the first facet;
• providing a first load lock coupled to the second facet;
• providing a robot adapted to operate in the transfer chamber to exchange substrates from the first carousel;
• and
• simultaneously or sequentially placing a first substrate into the first carousel and a second substrate into the first load lock.

A multi-axis robot, comprising:

• a first SCARA having
• a first upper arm adapted to rotate about a shoulder axis;
• a first forearm rotationally coupled to the first upper arm at an outboard end of the first upper arm;
• a first wrist member rotationally coupled to the first forearm at a first outer location of the first forearm;
• and
• a first end effector coupled to the first wrist member;
• a second SCARA having
• a second upper arm adapted to rotate about the shoulder axis;
• a second forearm rotationally coupled to the second upper arm at an outboard end of the second upper arm;
• a second wrist member rotationally coupled to the second forearm at a second outer location of the second forearm;
• and
• a second end effector coupled to the second wrist member;
• wherein the first end effector of the first SCARA extends in a first direction from the shoulder axis, and the second SCARA extends in a second direction from the shoulder axis, wherein the second direction is opposite the first direction.

An electronic device processing system, comprising:

• a mainframe housing having a transfer chamber;
• a process chamber coupled to a first facet of the mainframe housing;
• a load lock coupled to another facet of the transfer chamber at a position generally opposed from the first facet;
• and
• a robot including a first SCARA robot containing a first end effector and a second SCARA robot with a second end effector, the end effectors adapted to move within the transfer chamber to exchange substrates between the process chamber and the load lock wherein the first end effector and the second end effectors are operable to extend and retract along substantially co-parallel lines of action.