Multi-position batch load lock apparatus and systems and methods including same

A batch load lock apparatus, comprising:

• load lock body forming a load lock chamber, the load lock body including first and second load lock openings;
• a lift assembly adapted to move within the load lock chamber, the lift assembly including multiple wafer stations, each of the multiple wafer stations adapted to provide access to wafers through the first and second load lock openings;
• and
• wafer temperature control capability within the load lock chamber.

A method of operating a load lock apparatus, comprising:

• providing a batch load lock apparatus including a load lock body with first and second load lock openings, a lift assembly within the load lock body including multiple wafer stations;
• and
• moving the lift assembly;
• receiving wafers at the multiple wafer stations within the lift assembly through one of the first and second load lock openings;
• and
• changing temperature of the wafers.