High Throughput, Low Volume Clamshell Load Lock

A method of transferring a workpiece from a first environment at a first pressure to a second environment at a second pressure, lower than the first pressure, using a load lock having a top wall, a bottom wall, and a plurality of side walls, defining an upper chamber, the method comprising:

• opening the top wall, while the bottom wall is in a first position;
• loading the workpiece into the upper chamber;
• replacing the top wall so as to form a sealed upper chamber;
• extracting air from the upper chamber;
• and
• lowering the bottom wall to a second position, to expose the workpiece to the second environment.

A load lock comprising:

• a top wall, having a recessed central portion and a lip surrounding the recessed central portion;
• a wafer lift, disposed in the top wall having a plurality of shelves configured to hold a workpiece;
• a bottom wall;
• a plurality of side walls, wherein the top wall, the bottom wall and the side walls define an upper chamber;
• a valve in communication with the upper chamber and in communication with a pump to extract air from the upper chamber;
• a first actuator to move the top wall between a first open position and a second closed position, where the recessed central portion extends into a volume defined by the side walls and the bottom wall and the lip rests on a top surface of the side walls;
• a second actuator in communication with the bottom wall to move the bottom wall between a first position, where the bottom wall is sealed against the side walls, and a second position, where the bottom wall is not sealed against the side walls;
• and
• a third actuator in communication with the shelves to move the shelves between a first position where a robotic mechanism may access the workpiece, and a second position where the workpieces are proximate the underside of the recessed central portion.