Rotary flex union

A rotary flex union for use in semiconductor processing, the union comprising:

• a base portion;
• a stem rotatably coupled to the base portion;
• a drive block portion connected at a first end to the stem and at the second end to a first tube fitting;
• and
• a coiled flexible tube member having first and second ends, the first end coupled to the drive block portion, the second end coupled to a second tube fitting;
• wherein the coiled flexible tube member has a first configuration associated with an non-rotated position of the union and a second configuration associated with a rotated position of the union;
• and
• wherein in the first configuration the coiled flexible tube member has a first bend radius, and in the second configuration the coiled flexible tube member has a second bend radius, the first and second bend radii being different.

A rotary platen apparatus, comprising:

• a platen base having a platen rotatably coupled thereto;
• and
• a rotary union for supplying cryogenic fluid from a fluid source to cool the platen, the rotary union coupled between the platen base and the platen, the rotary union comprising a coiled flexible tube member having a first configuration associated with a non-rotated position of the platen and a second configuration associated with a rotated position of the platen;
• wherein in the first configuration the coiled flexible tube member has a first bend radius, and in the second configuration the coiled flexible tube member has a second bend radius that is smaller than the first radius.