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US 2014/0270732 A1Published application
Heating lamp assembly
AssigneeApplied Materials, Inc.
InventorsRICHARD O. COLLINS, NYI OO MYO
Life of this patent
Estimating the term…
Abstract
Embodiments of heating lamps and heating lamp assemblies are disclosed herein. In some embodiments, a heating lamp may include a bulb; a reflector circumscribing the bulb proximate a first end of the bulb; a base coupled to the reflector on a side opposite the bulb; a handle coupled to the base on a side opposite the reflector, wherein the handle comprises a body having a first end coupled to the base and an opposing second end; a first conductor extending from the bulb and through the base and the handle in a direction opposite the bulb; and a second conductor extending from the bulb and through the base and the handle in a direction opposite the bulb.
Claims20
A heating lamp for use in a semiconductor process chamber, comprising:
- a bulb;
- a reflector circumscribing the bulb proximate a first end of the bulb;
- a base coupled to the reflector on a side opposite the bulb;
- a handle coupled to the base on a side opposite the reflector, wherein the handle comprises a body having a first end coupled to the base and an opposing second end;
- a first conductor extending from the bulb and through the base and the handle in a direction opposite the bulb;
- and
- a second conductor extending from the bulb and through the base and the handle in a direction opposite the bulb.
4 more elements
A lamp assembly for use in a substrate processing chamber, comprising:
- (a) a plurality of heating lamps, wherein each heating lamp comprises:
- (i) a bulb;
- (ii) a reflector circumscribing the bulb proximate a first end of the bulb;
- (iii) a base coupled to the reflector on a side opposite the bulb;
- (iv) a handle coupled to the base on a side opposite the reflector, wherein the handle comprises a body having a first end coupled to the base and an opposing second end;
- (v) a first conductor extending from the bulb and through the base and the handle in a direction opposite the bulb;
- (vi) a second conductor extending from the bulb and through the base and the handle in a direction opposite the bulb;
- and
- (vii) a plurality of pins disposed about an outer surface of the body of the handle, wherein the plurality of pins are unequally spaced;
- (b) an annular body comprising a sidewall having an outer surface, an inner surface defining a central opening in the annular body, and a plurality of openings disposed through the sidewall to allow the bulb of the heating lamp to pass into the central opening;
- and
- (c) a plurality of lamp sockets, wherein a lamp socket comprises:
- (i) an elongated body having a first end coupled to the outer surface of the annular body at an opening in the sidewall, and a second end having an opening to pass the heating lamp through the elongated body, wherein the elongated body circumscribes the handle, the base and the reflector;
- and
- (ii) a plurality of slots proximate the second end, wherein each slot is configured to retain a corresponding pin.
12 more elements
A substrate processing chamber, comprising:
- a chamber body having an inner volume;
- a substrate support pedestal having a substrate supporting surface to support a substrate;
- and
- a lamp assembly disposed at least one of above or below the substrate, the lamp assembly comprising:
- (a) a plurality of heating lamps, wherein each heating lamp comprises:
- (i) a bulb;
- (ii) a reflector circumscribing the bulb proximate a first end of the bulb;
- (iii) a base coupled to the reflector on a side opposite the bulb;
- (iv) a handle coupled to the base on a side opposite the reflector, wherein the handle comprises a body having a first end coupled to the base and an opposing second end;
- (v) a first conductor extending from the bulb and through the base and the handle in a direction opposite the bulb;
- (vi) a second conductor extending from the bulb and through the base and the handle in a direction opposite the bulb;
- (vii) a first spring circumscribing a portion of the first conductor;
- (viii) a second spring circumscribing a portion of the second conductor within the body of the handle;
- and
- (ix) a plurality of pins disposed about an outer surface of the body of the handle, wherein the plurality of pins are unequally spaced;
- (b) an annular body comprising a sidewall having an outer surface, an inner surface defining a central opening in the annular body, and a plurality of openings disposed through the sidewall to allow the bulb of the heating lamp to pass into the central opening;
- and
- (c) a plurality of lamp sockets, wherein a lamp socket comprises:
- (i) an elongated body having a first end coupled to the outer surface of the annular body at an opening in the sidewall, and a second end having an opening to pass the heating lamp through the elongated body, wherein the elongated body circumscribes the handle, the base and the reflector;
- and
- (ii) a plurality of slots proximate the second end, wherein each slot is configured to retain a corresponding pin.
18 more elements
Dependencies are inferred from the claim text.