Method for producing template, method for checking template, and template material
AssigneeKabushiki Kaisha Toshiba
InventorSeiji MORITA
Life of this patent
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Abstract
In one embodiment, a method for producing a template includes applying a resin to a first template having a first concavo-convex pattern, hardening the resin, releasing the hardened resin from the first template to produce a second template having a second concavo-convex pattern corresponding to the first concavo-convex pattern, and enlarging the second template.
Claims16
A method for producing a template comprising:
- applying a resin to a first template having a first concavo-convex pattern;
- hardening the resin;
- releasing the hardened resin from the first template to produce a second template having a second concavo-convex pattern corresponding to the first concavo-convex pattern;
- and
- enlarging the second template.
A method for checking a template comprising:
- applying a resin to a first template having a first concavo-convex pattern;
- hardening the resin;
- releasing the hardened resin from the first template to produce a second template having a second concavo-convex pattern corresponding to the first concavo-convex pattern;
- enlarging the second template;
- comparing a size of the second enlarged concavo-convex pattern with that of the first concavo-convex pattern to determine an enlargement ratio;
- checking the second enlarged template to detect a defect;
- and
- calculating a position of a defect on the first template based on the position of the defect on the second template and the enlargement ratio.
A template material that is applied to a first template having a concavo-convex pattern, hardened, and released to form a second template, comprising a liquid silicon resin, a first thermoplastic resin, and a second thermoplastic resin having no cyclic structure.
Dependencies are inferred from the claim text.