Chemical vapor deposition reactor having ceramic lining for production of polysilicon
AssigneeEcolive Technologies LTD.
InventorsAnatoly Alexandrovich Goncharov, Yury Dmitrievich Kalashnikov
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Abstract
Apparatus configured to produce polysilicon by chemical vapor deposition, including a reactor vessel having an inner surface defining at least a portion of a chamber, the inner surface having a lining of quartz ceramic. The apparatus also includes a silicon substrate disposed within the chamber of the reactor vessel, the silicon substrate having a deposition surface upon which polysilicon is deposited. Methods of producing polysilicon using such apparatus, as well as methods for applying the quartz ceramic lining onto a reactor vessel, are also provided.
Claims29
An apparatus configured to produce polysilicon by chemical vapor deposition, comprising:
- a reactor vessel having an inner surface defining at least a portion of a chamber, the inner surface having a lining of quartz ceramic;
- and
- a silicon substrate disposed within the chamber of the reactor vessel, the silicon substrate having a deposition surface upon which polysilicon is deposited.
A method of producing polysilicon using a reactor vessel having an inner surface defining at least a portion of a chamber, and a silicon substrate disposed within the chamber, the method comprising:
- applying a lining of quartz ceramic to the inner surface of the reactor vessel;
- and
- introducing at least one reactant gas for chemical vapor deposition into the reactor vessel to contact the silicon substrate at a suitable reaction temperature to produce polysilicon by reaction of the reactant gases, the polysilicon being deposited on the silicon substrate.
A method of improving an existing reactor vessel configured for the production of polysilicon by chemical vapor deposition, comprising:
- providing a reactor vessel having an inner surface defining at least a portion of a chamber;
- and
- applying a lining of quartz ceramic to the inner surface of the reactor vessel.
Dependencies are inferred from the claim text.