Substrate transfer device, substrate processing apparatus, and substrate accommodation method

A substrate processing apparatus comprising:

• a substrate transfer device configured to load a substrate from an outside;
• a substrate processing unit configured to process the substrate loaded by the substrate transfer device;
• and
• a transit unit configured to deliver the substrate loaded by the substrate transfer device to the substrate processing unit,
• wherein the substrate transfer device includes:
• a substrate transfer unit configured to deliver the substrate with respect to a cassette configured to accommodate the substrate;
• a detection unit configured to detect the substrate accommodated in the cassette;
• and
• a control device configured to control the substrate transfer unit,
• wherein the control device includes:
• a transfer control unit configured to control the substrate transfer unit to accommodate the substrate at a predetermined target accommodation position;
• a determination unit configured to determine an actual accommodation position for the substrate based on a detection result of the detection unit after the detection unit detects the substrate accommodated in the cassette;
• and
• a correction unit configured to correct a predetermined target accommodation position as an accommodation position for another substrate based on a difference between the actual accommodation position and the target accommodation position for the substrate.

A substrate accommodation method comprising:

• a first accommodation process of controlling a substrate transfer unit, which delivers a substrate with respect to a cassette configured to accommodate the substrate, to accommodate the substrate at a predetermined target accommodation position
• a determination process of determining an actual accommodation position for the substrate based on a detection result of a detection unit configured to detect the substrate accommodated in the cassette after the detection unit detects the substrate accommodated in the cassette;
• a correction process of correcting a predetermined target accommodation position as an accommodation position for another substrate based on a difference between the actual accommodation position and the target accommodation position for the substrate;
• and
• a second accommodation process of controlling the substrate transfer unit to accommodate the another substrate at the corrected target accommodation position in the correction process.