Method and apparatus for generating x-ray radiation
AssigneeCarl Zeiss Meditec AG
InventorFrank Weigand
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AssigneeCarl Zeiss Meditec AG
InventorFrank Weigand
Estimating the term…
The present invention relates in particular to methods and apparatuses for generating and/or providing X-ray radiation with specific radiation characteristics, in particular with a specific radiation dose rate curve (10). In order to provide simple and cost efficient solution, it is provided according to the invention, that the X-ray radiation is generated and/or provided, by composing and/or adapting the X-ray radiation with the specific radiation characteristics, in particular with the specific radiation dose rate curve (10), proportionally from a first specification X-ray radiation with a defined first radiation characteristics, in particular with a predetermined first radiation dose rate curve (11) and a second specification X-ray radiation, which is different from the first specification X-ray radiation, with defined second radiation characteristics, in particular with a predetermined second radiation dose rate curve (12).
Method for generating and/or providing a specific radiation dose rate curve for an X-ray radiation for irradiation of a substrate, characterized in that the specific radiation dose rate curve is generated and/or provided, by selecting at least two predetermined radiation dose rate curves, which are different from the specific radiation dose rate curve which is to be generated and/or provided, and by combining and/or adapting the specific radiation dose rate curve proportionally from the at least two predetermined radiation dose rate curves.
Method for generating and/or providing of X-ray radiation with specific radiation characteristics, in particular with a specific radiation dose rate curve, characterized in that the X-ray radiation is generated and/or provided by combining and/or adapting the X-ray radiation with the specific radiation characteristics, in particular with the specific radiation dose rate curve, proportionally from a first specification X-ray radiation with defined first radiation characteristics and a second specification X-ray radiation with defined second radiation characteristics, in particular with a predetermined second radiation dose rate curve, wherein the second specification X-ray radiation differs from the first specification X-ray radiation.
Apparatus (30) for generating and/or providing a specific radiation dose rate curve (10) for an X-ray radiation for irradiating a substrate (1), characterized in that the apparatus (30) has a selection appliance for selecting at least two predetermined radiation dose rate curves (11, 12), which are different from the specific radiation dose rate curve (10), which is to be generated and/or provided, and that the apparatus (30) has an appliance for proportionally composing and/or adapting the specific radiation dose rate curve (10) from the at least two predetermined radiation dose rate curves (11, 12).
Apparatus (30) for generating and/or providing X-ray radiation with specific radiation characteristics, in particular with a specific radiation dose rate curve (10), characterized in that the apparatus (30) has an appliance for generating and/or providing a first specification X-ray radiation with defined first radiation characteristics, in particular with a specified first radiation dose rate curve (11) and a second specification X-ray radiation with defined second radiation characteristics, in particular with a predetermined second radiation dose rate curve (12), wherein the second specification X-ray radiation is different from the first specification X-ray radiation, and that the apparatus (30) has an appliance for proportionally composing and/or adjusting the X-ray radiation with the specific radiation characteristics, in particular with the specific radiation dose rate curve (10) from the first specification X-ray radiation and the second specification X-ray radiation.
Dependencies are inferred from the claim text.