Physical/chemical sensor, physical/chemical phenomenon sensing device, and method for manufacturing same

A physical/chemical sensor comprising:

• a membrane section that forms an air-gap on a surface of a light receiving surface of a light receiving element and faces the light receiving surface;
• and
• a molecule fixation membrane deposited on an outside surface of the membrane section, wherein the molecule fixation membrane is adapted to fix a molecule contained in a gas or a liquid, wherein
• the membrane section has optical transparency and flexibility, and
• the membrane section and the surface of the light receiving surface form a Fabry-Perot resonator.

A manufacturing method of a physical/chemical sensor, the method comprising:

• forming a sacrificial layer by depositing a material, which can be etched, on a light receiving surface of a light receiving element;
• depositing a protection layer on an area excluding a surface of the sacrificial layer;
• forming a membrane section by depositing a membrane section constituent material on a membrane section construction area on the surface of the sacrificial layer excluding a through area for etching;
• depositing a molecule fixation material on the surface of the membrane section constituent material;
• etching the sacrificial layer using the through area for etching;
• and
• coating the through area for etching.

A method of a physical/chemical phenomenon sensing device, the method comprising:

• segmenting a plurality of light receiving elements formed on the same substrate into two kinds consisting of one kind for detection sensor or sensors and another kind for reference sensor or sensors and forming a sacrificial layer by depositing a material, which can be etched, on a light receiving surface of the light receiving element for the detection sensor;
• depositing a protection layer on an area excluding the surface of the sacrificial layer and the light receiving surface of the light receiving element for the reference sensor;
• forming a membrane section by depositing a membrane section constituent material on a membrane section construction area on the surface of the sacrificial layer excluding a through area for etching and the light receiving surface of the light receiving element for the reference sensor;
• depositing a molecule fixation material on the surface of the membrane section constituent material;
• etching the sacrificial layer using the through area for etching;
• and
• coating the through area for etching.