Conformal Anti-Reflective Coating

A structure comprising:

• a substrate implanted with ions, wherein the substrate has a topography that comprises a relief;
• an anti-reflective film implanted with ions, wherein the anti-reflective film conformally overlays the substrate, and wherein the anti-reflective film is formed of a compound selected from the group consisting of:
• (i) an organic compound chemically bound to an inorganic compound, wherein one of the organic compound and the inorganic compound is bound to the substrate and wherein the organic compound is configured to absorb light at at least one wavelength selected in the range 150-500 nm, or (ii) a monodisperse organic compound configured to absorb light at at least one wavelength selected in the range 150-500 nm;
• and
• a photoresist layer formed on the anti-reflective film.

A method comprising:

• providing a substrate having a topography that comprises a relief;
• providing an anti-reflective film conformally over the substrate using a molecular layer deposition step, wherein the anti-reflective film is formed of a compound selected from the group consisting of:
• (i) an organic compound chemically bound to an inorganic compound, wherein one of the organic compound and the inorganic compound is bound to the substrate and wherein the organic compound absorbs light at at least one wavelength selected in the range 150-500 nm, or (ii) a monodisperse organic compound absorbing light at at least one wavelength selected in the range 150-500 nm;
• and
• providing a photoresist layer on the anti-reflective film.