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US 2014/0231933 A1Published application
Gas sensor and manufacturing method thereof
AssigneeElectronics and Telecommunications Research Institute
InventorsYoung-Jun YU, Hongkyw CHOI, Jin Sik CHOI, Kwang Hyo CHUNG, Jin Tae KIM, Doo Hyeb YOUN, Choon Gi CHOI
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Abstract
Provided is a gas sensor including a substrate, a sensing electrode extended in a first direction on the substrate, and a plurality of heaters disposed in a second direction crossing the first direction on the substrate. The plurality of heaters is separated at both sides of the sensing electrode. The plurality of heaters includes graphene.
Claims15
A gas sensor comprising:
- a substrate;
- a sensing electrode extended in a first direction on the substrate;
- and
- a plurality of heaters disposed in a second direction crossing the first direction on the substrate, the plurality of heaters being separated at both sides of the sensing electrode,
- wherein the plurality of heaters comprise graphene.
2 more elements
A manufacturing method of a gas sensor, the method comprising:
- forming a sensing electrode in a first direction on a substrate;
- and
- forming a plurality of heaters in a second direction crossing the first direction at both sides of the sensing electrode,
- at least one of the sensing electrode and the heaters comprising graphene.
1 more element
Dependencies are inferred from the claim text.