Semiconductor device
AssigneeToyota Jidosha Kabushiki Kaisha
InventorTatsuji NAGAOKA
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Abstract
A semiconductor device includes a semiconductor substrate and a first electrode. An element region, and a non-element region that surrounds this element region, are formed on the semiconductor substrate. The first electrode is arranged on the semiconductor substrate and is electrically connected to the element region formed on the semiconductor substrate. The first electrode is made of at least two materials having different moduli of elasticity. A modulus of elasticity per unit area of an outer peripheral portion of the first electrode when the semiconductor substrate is viewed from above is smaller than a modulus of elasticity per unit area of a center portion of the first electrode.
Claims8
A semiconductor device comprising:
- a semiconductor substrate on which an element region is formed;
- and
- a first electrode that is arranged on the semiconductor substrate and is electrically connected to the element region formed on the semiconductor substrate, wherein
- the first electrode is made of at least two materials with different moduli of elasticity, and
- a modulus of elasticity per unit area of an outer peripheral portion of the first electrode when the semiconductor substrate is viewed from above is smaller than a modulus of elasticity per unit area of a center portion of the first electrode.
Dependencies are inferred from the claim text.