Apparatus for storing substrates
AssigneeSamsung Display Co., Ltd.
InventorsJi-Eun KIM, Dong-Yoon SO, Han-Soo KIM
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Abstract
An apparatus for storing a substrate on which a pattern is formed includes a main body storing the substrate, a first pad located at the bottom of the main body and including a first groove supporting one edge of the substrate, a second pad neighboring the first pad and including a second groove supporting the center of the substrate, and a third pad spaced from the first pad, the second pad being disposed between the first and third pads, the third pad including a third groove supporting the other edge of the substrate.
Claims8
An apparatus for storing a substrate on which a pattern is formed, the apparatus comprising:
- a main body storing the substrate;
- a first pad located at the bottom of the main body and including a first groove supporting one edge of the substrate;
- a second pad neighboring the first pad and including a second groove supporting the center of the substrate;
- and
- a third pad spaced from the first pad, the second pad being disposed between the first and third pads, the third pad including a third groove supporting the other edge of the substrate.
Dependencies are inferred from the claim text.