Tool and process for treating an object by plasma generators
AssigneeValeo Vision
InventorsMarc Brassier, Frederic Moret, Frederic Bretagnol
Life of this patent
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Abstract
An apparatus for treating a surface of an object comprises a vacuum chamber in which the object is intended to be placed, and means, in communication with the vacuum chamber, for treating the surface of the object, comprising at least two plasma generator. The apparatus also comprises means for controlling each generator independently of any other generator. These controlling means comprise means for activating/deactivating the generator. The invention also relates to a process for treating a surface of an object.
Claims20
An apparatus for treating a surface of an object, of the type comprising:
- a vacuum chamber in which the object is intended to be placed;
- and
- means, in communication with the vacuum chamber, for treating the surface of the object, comprising at least two plasma generators,
- wherein it comprises means for controlling each generator independently of any other generator, the controlling means comprising means for activating/deactivating the generator.
An apparatus for treating a surface of an object, of the type comprising:
- a vacuum chamber in which the object is intended to be placed;
- and
- at least two plasma generators in communication with the vacuum chamber, for treating the surface of the object,
- a controller for controlling each generator independently of any other generator.
Dependencies are inferred from the claim text.