Chemical supplier, processing apparatus including the chemical supplier
AssigneeSamsung Electronics Co., Ltd.
InventorsSang-Jine PARK, Bo-Un YOON, Jeong-Nam HAN, Kee-Sang KWON, Doo-Sung YUN, Won-Sang CHOI
Life of this patent
Estimating the term…
Abstract
A chemical supplier includes a chemical reservoir containing a chemical mixture at a room temperature, an inner space of the chemical reservoir being separated from surroundings, a supply line through which the chemical mixture is supplied to a process chamber from the chemical reservoir, an inline heater positioned on the supply line and heating the chemical mixture in the supply line to a process temperature, and a power source driving the chemical mixture to move the chemical mixture toward the process chamber.
Claims26
A chemical supplier, comprising:
- a chemical reservoir containing a chemical mixture at a room temperature, an inner space of the chemical reservoir being separated from surroundings;
- a supply line through which the chemical mixture is supplied to a process chamber from the chemical reservoir;
- an inline heater positioned on the supply line and heating the chemical mixture in the supply line to a process temperature;
- and
- a power source driving the chemical mixture to move the chemical mixture toward the process chamber.
A chemical supplier, comprising:
- a plurality of source tanks, each source tank of the plurality of source tanks containing a respective chemical source of a plurality of chemical sources;
- a plurality of source feed lines, each source feed line of the plurality of source feed lines being connected to a respective source tank and having a feeding pump thereon, respective ones of the chemical sources being fed through the respective source feed lines by the feeding pump;
- a plurality of inline heaters, each inline heater of the plurality of inline heaters being arranged on a respective source feeding line and heating the respective chemical source to a process temperature;
- a chemical reservoir connected to the source feed lines and mixing the chemical sources at the process temperature into a chemical mixture, an inner space of the chemical reservoir being separated from surroundings;
- a supply line through which the chemical mixture is supplied to a process chamber from the chemical reservoir;
- and
- a power source that drives the chemical mixture to move toward the process chamber.
An apparatus for performing a wet process, the apparatus comprising:
- a process chamber in which a substrate to be processed by a wet process is positioned;
- a chemical supplier that supplies a chemical mixture to perform the wet process onto the substrate, the chemical supplier including a chemical reservoir containing the chemical mixture and an inline heater for heating the chemical mixture to a process temperature, an inner space of the chemical reservoir being separated from surroundings;
- and
- a cleaning solution supplier that supplies a cleaning solution onto the substrate.
24-31. (canceled)
A chemical supplier, comprising:
- a chemical reservoir containing a chemical mixture at a room temperature, an inner space of the chemical reservoir being separated from surroundings;
- a supply line through which the chemical mixture is supplied to a process chamber from the chemical reservoir;
- and
- an inline heater positioned on the supply line and heating the chemical mixture in the supply line to a process temperature, the inline heater including:
- a heater body,
- a tube having a coil shape inside the heater body, the supply line being connected to the tube such that the chemical mixture flows through the tube,
- a heat transfer member filling up the heater body and surrounding the tube, and
- a heating member that heats the heater transfer member such that heat is transferred to the tube from the heat transfer member.
Dependencies are inferred from the claim text.