Multiple Beam Pulsed Laser Deposition Of Composite Films

Abstract

A system and method for multiple beam laser deposition of thin films wherein separate laser beams are used to ablate material from separate targets for concurrent deposition on a common substrate. The laser beams may have the same or different wavelengths, energies, or pulse rates. The targets may be similar or differing classes of materials including, but not limited to polymers, organics, inorganics, nanocrystals, solutions, or mixtures of materials. One or more targets may be disposed on a tiltable mount to adjust the direction and mixing of the ablation plumes from the multiple targets. The target surface may be scanned by moving the target in one or more axes. Multiple ablation modes may be concurrently employed at the various targets, including, but not limited to pulsed laser, MAPLE, IR-MAPLE and other modes. A polymer-nano-composite film example is disclosed.

Dependencies are inferred from the claim text.