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US 2014/0227442 A1Published application
Thin film deposition device including deposition-preventing unit and method of removing deposits thereof
AssigneeSamsung Display Co., Ltd.
InventorsMyung-Soo Huh, Sun-Ho Kim, Cheol-Rae Jo, Hyun-Woo Joo
Life of this patent
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Abstract
Provided is a thin film deposition device including a deposition-preventing unit and a method of removing deposits thereof. The method includes: separating a deposition-preventing unit including at least one deposition-preventing plate and a deformation unit coupled to an outer surface of the at feast one deposition-preventing plate from a chamber of the thin film deposition device; and removing a film formation layer from the deposition-preventing plate.
Claims16
A thin film deposition device comprising:
- a chamber;
- a deposition unit in the chamber configured to deposit a raw material on a substrate;
- and
- a deposition-preventing unit in the chamber comprising at least one deposition-preventing plate and a deformation unit coupled to one surface of the deposition-preventing plate.
1 more element
A method of removing deposits of a thin film deposition device, the method comprising:
- separating a deposition-preventing unit comprising at least one deposition-preventing plate and a deformation unit coupled to an outer surface of the at least one deposition-preventing plate from a chamber of the thin film deposition device;
- and
- removing a film formation layer from the deposition-preventing plate.
Dependencies are inferred from the claim text.