Enhancing resolution in lithographic processes using high refractive index fluids

Abstract

An approach for enhancing resolution in a lithographic process (e.g., an immersion lithographic process) is provided. Specifically, a material having a high reflexive index (e.g., water) is provided on opposite sides of an objective lens. This allows a set of light rays (high intensity) to be directed/passed from a light source, through a condenser lens, over a mask, through the material positioned on one side of the objective lens, through the objective lens, through the material on the opposite side of the objective lens, and to a wafer that is then patterned. Positioning the material on both sides of the objective lens allows for improved resolution and lithographic patterning of the wafer for both on-axis illumination and off-axis illumination techniques.

Dependencies are inferred from the claim text.