Acoustic wave device and method of fabricating the same
AssigneeTaiyo Yuden Co., Ltd.
InventorTakuma KUROYANAGI
Life of this patent
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Abstract
An acoustic wave device includes: a substrate; a functional element formed on the substrate and including an excitation electrode that excites an acoustic wave; a columnar electrode formed on the substrate and electrically connected to the excitation electrode; a metal frame body formed on the substrate and surrounding the functional element and the columnar electrode; and a ceramic substrate sealing the functional element in combination with the metal frame body, a first metal layer bonded to the columnar electrode and a second metal layer bonded to the metal frame body being formed on a surface of the ceramic substrate.
Claims8
An acoustic wave device comprising:
- a substrate;
- a functional element formed on the substrate and including an excitation electrode that excites an acoustic wave;
- a columnar electrode formed on the substrate and electrically connected to the excitation electrode;
- a metal frame body formed on the substrate and surrounding the functional element and the columnar electrode;
- and
- a ceramic substrate sealing the functional element in combination with the metal frame body, a first metal layer bonded to the columnar electrode and a second metal layer bonded to the metal frame body being formed on a surface of the ceramic substrate.
A method of fabricating an acoustic wave device, the method comprising:
- forming a functional element including an excitation electrode that excites an acoustic wave on a substrate,
- simultaneously forming a columnar electrode electrically connected to the excitation electrode and a metal frame body surrounding the functional element and the columnar electrode on the substrate;
- sealing the functional element by stacking a ceramic substrate on the columnar electrode and the metal frame body so that a first metal layer formed on the ceramic substrate is stacked on the columnar electrode to form a terminal portion and a second metal layer formed on the ceramic substrate is stacked on the metal frame body to form a sealing portion.
Dependencies are inferred from the claim text.