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AssigneeFUJIFILM Corporation
InventorsSatoshi WAKAMATSU, Akiko HATTORI
Estimating the term…
A nanoimprinting apparatus is equipped with: a distortion imparting device that applies external force onto an imprinting member, which is one of a mold and a substrate, to maintain the imprinting member in a predetermined flexed state, thereby imparting permanent distortion to the imprinting member; and an imprinting unit that utilizes the imprinting member having the permanent distortion imparted thereto by the distortion imparting device to execute imprinting. A pattern of protrusions and recesses of the mold can be caused to contact resist from the central portion thereof utilizing any imprinting member, regardless of the rigidity of the imprinting member.
A nanoimprinting apparatus, comprising:
A distortion imparting device that performs the function of applying external force onto an imprinting member, which is one of a mold having a fine pattern of protrusions and recesses on a first surface thereof and a substrate for nanoimprinting having resist on a first surface thereof, to maintain the imprinting member in a predetermined flexed state, thereby imparting permanent distortion to the imprinting member, comprising:
A distortion imparting device that performs the function of applying external force onto an imprinting member, which is one of a mold having a fine pattern of protrusions and recesses on a first surface thereof and a substrate for nanoimprinting having resist on a first surface thereof, to maintain the imprinting member in a predetermined flexed state, thereby imparting permanent distortion to the imprinting member, comprising:
Dependencies are inferred from the claim text.