Stage unit and laser annealing apparatus including the same
AssigneeSamsung Display Co., Ltd.
InventorHiroyuki FUJITA
Life of this patent
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Abstract
A stage unit may include a frame, a first guide device, a stage, a second guide device and a pad. The first guide device may be arranged over an upper surface of the frame and configured to guide the stage in a first direction. T he stage may be movably connected to the first guide device. The second guide device may be arranged over an upper surface of the stage and configured to guide the pad in a second direction substantially perpendicular to the first direction. The pad may be movably connected to the second guide device and configured to support a substrate. Therefore, the substrate may be supported by and uniformly floated by the frame, the stage and the pad.
Claims15
A stage unit comprising:
- a frame;
- a first guide device arranged over an upper surface of the frame;
- a stage movably connected to the first guide device, wherein the first guide device is configured to guide movement of the stage in a first direction;
- a second guide device arranged over an upper surface of the stage;
- and
- a pad movably connected to the second guide device and configured to support a substrate, wherein the second guide device is configured to guide the pad in a second direction substantially perpendicular to the first direction.
A stage unit comprising:
- a frame;
- a plurality of mounts mounted over a lower surface of the frame;
- a first guide device including at least one side guide that is arranged over each of the side edge portions of an upper surface of the frame, and at least one central guide arranged over a central portion of the upper surface of the frame;
- a stage movably connected to the first guide device, wherein the first guide device is configured to guide movement of the stage in a first direction;
- a second guide device arranged over an upper surface of the stage;
- and
- a floating pad movably connected to the second guide device and configured to float a substrate, wherein the second guide device is configured to guide the floating pad in a second direction substantially perpendicular to the first direction.
A laser annealing apparatus comprising:
- a frame;
- a first guide device arranged over an upper surface of the frame;
- a stage movably connected to the first guide device, wherein the first guide device is configured to guide movement of the stage in a first direction;
- a second guide device arranged over an upper surface of the stage;
- a pad movably connected to the second guide device and configured to support a substrate, wherein the second guide device is configured to guide the pad in a second direction substantially perpendicular to the first direction;
- and
- a laser-irradiator unit arranged over the pad, the laser-irradiator unit configured to irradiate a laser beam to the substrate supported by the pad to crystalline an amorphous silicon layer of the substrate into a poly silicon layer.
Dependencies are inferred from the claim text.