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US 2014/0208857 A1Published application
Mems resonator pressure sensor
AssigneeNXP B.V.
InventorsKim Phan Le, Willem Frederik Adrianus Besling
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Abstract
A resonant MEMS pressure sensor in which the resonator mass of the MEMS resonator is anchored both to the fixed base beneath the resonator cavity as well as to the top membrane over the resonator cavity. This provides a more robust fixing of the resonator mass and offers a dependence of resonant frequency on the pressure outside the cavity.
Claims15
A pressure sensor comprising:
- a MEMS resonator formed within a cavity, wherein the cavity comprises a fixed base and a top membrane which deforms in response to the pressure (P) to be sensed, wherein the resonator has a resonant frequency which is dependent on the incident pressure,
- wherein the MEMS resonator comprises a resonator mass which is anchored both to the fixed base and the top membrane.
A method of fabricating a pressure sensor, comprising:
- forming a MEMS resonator within a cavity, wherein the cavity comprises a fixed base and a top membrane which deforms in response to the pressure (P) to be sensed, wherein the resonator has a resonant frequency which is dependent on the incident pressure;
- and
- anchoring a resonator mass both to the fixed base and the top membrane.
Dependencies are inferred from the claim text.