Apparatus and method of detecting a defect of a semiconductor device
OwnerGeun-woo Kim, Hyun Kim +4inventors
InventorsGeun-woo Kim, Hyun Kim, Yun-sik Yoo, Sang-jun Kim, Jae-yong Park, Tae-gyeong Chung
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Abstract
A semiconductor device defect detecting apparatus including: a sensor disposed on semiconductor process equipment, the sensor configured to detect a signal emitted from a semiconductor device in contact with the semiconductor process equipment; and a signal analyzer configured to determine whether the semiconductor device is defective based on the detected signal in a predetermined frequency range.
Claims23
A semiconductor device defect detecting apparatus, comprising:
- a sensor disposed on semiconductor process equipment, the sensor configured to detect a signal emitted from a semiconductor device in contact with the semiconductor process equipment;
- and
- a signal analyzer configured to determine whether the semiconductor device is defective based on the detected signal in a predetermined frequency range.
A semiconductor device defect detecting apparatus, comprising:
- a sensor disposed on a chuck table of semiconductor process equipment, the sensor configured to detect a signal emitted from a semiconductor device in contact with the chuck table;
- and
- a signal analyzer configured to analyze the detected signal to determine whether the semiconductor device is defective by using a predetermined criteria.
A method for detecting a defect in a semiconductor device, comprising:
- detecting, in real-time, a signal emitted from a semiconductor device being processed by and in contact with semiconductor process equipment, wherein the detecting is performed by a sensor disposed on the semiconductor process equipment;
- and
- determining, whether the semiconductor device is defective based on the detected signal in a predetermined frequency range, wherein the determining is performed by a signal analyzer.
A method for detecting a defect in a semiconductor device, comprising:
- detecting, in real time, a signal emitted from a semiconductor device in contact with a chuck table of semiconductor process equipment, wherein the detecting is performed by a sensor disposed on the chuck table of the semiconductor process equipment;
- and
- analyzing the detected signal to determine whether the semiconductor device is defective by using a predetermined criteria, wherein the analyzing is performed by a signal analyzer.
A method for detecting a defect in a semiconductor device, comprising:
- detecting, in real time, a signal emitted from a semiconductor device in contact with a chuck table of semiconductor process equipment, wherein the detecting is performed by at least three sensors disposed on the chuck table of the semiconductor process equipment;
- determining whether the semiconductor device is defective based on the detected signal, wherein the determining is performed by a signal analyzer;
- storing information about a location of a defect in the semiconductor device, wherein the storing is performed by a controller;
- and
- skipping, based on the stored information, a subsequent process to be performed on the location of the defect by another semiconductor process equipment, wherein the skipping is performed by the controller.
Dependencies are inferred from the claim text.