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US 2014/0207284 A1Published application
Wafer center finding with kalman filter
AssigneeBrooks Automation, Inc.
InventorsChristopher C. Kiley, Peter van der Meulen, Forrest T. Buzan, Paul E. Fogel
Life of this patent
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Abstract
A device is provided having a robotic arm for handling a wafer, the robotic arm including one or more encoders that provide encoder data identifying a position of one or more components of the robotic arm. The device also having a processor adapted to apply an extended Kalman Filter to the encoder data to estimate a position of the wafer.
Claims20
A device comprising:
- a robotic arm having an end effector for handling a wafer, the robotic arm including one or more encoders that provide encoder data identifying a position of one or more components of the robotic arm;
- a linear array of charge coupled devices coupled to the robotic arm, the linear array of charge coupled devices being configured to capture edge data from the wafer, resting on the end effector, to provide an actual position of the wafer;
- and
- a processor configured
- to apply an extended Kalman filter to the encoder data to provide an estimates position of the wafer,
- determine an error between the actual position of the wafer and the estimated position of the wafer, and
- update one or more variables for the extended Kalman filter based upon the error.
4 more elements
A method comprising:
- disposing a linear array of charge-coupled devices coupled to a robotic arm including an end effector adapted to handle a wafer;
- providing one or more encoders that provide encoder data identifying a position of one or more components of the robotic arm;
- applying the encoder data to an extended Kalman filter to provide an estimated position of the wafer;
- handling the wafer and capturing edge data from the wafer, resting on the end effector, with the linear array of charge-coupled devices to provide an actual position of the wafer;
- determining an error between the actual position of the wafer and the estimated position of the wafer;
- and
- updating one or more variables for the extended Kalman filter based upon the error.
4 more elements
Dependencies are inferred from the claim text.