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US 2014/0197898 A1Published application
High Sensitivity Micro-Piezoelectric Tunable Resonator
OwnerYing Hsu, Mike Tracy +3inventors
InventorsYing Hsu, Mike Tracy, Brian Bircumshaw, Ning Chen, Salah Uddin
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Abstract
A highly sensitive micro-piezoelectric tunable resonator element and device that uses a tapered transition region from the actuator and sensor elements to the resonator beam to permit maximum mechanical energy transfer to the beam. A dual-resonator beam embodiment with a shared tuning element is provided in an alternative embodiment.
Claims13
A tunable resonator comprising:
- a first terminal portion,
- a resonant actuator element,
- a sensor element,
- a resonator beam in mechanical connection with the resonant actuator element and the sensor element, and,
- a second terminal portion.
2 more elements
A tunable resonator comprising:
- a base substrate,
- a first terminal portion,
- a resonant actuator element,
- a sensor element,
- a resonator beam in mechanical connection with the resonant actuator element and the sensor element,
- a tuning actuator element, and,
- a second terminal portion.
4 more elements
A dual-beam tunable resonator comprising:
- a plurality of resonant actuator elements,
- a plurality of sensor elements,
- a plurality of resonator beams each of which is in mechanical connection with at least one of the resonant actuator elements and at least one of the sensor elements, and,
- a shared tuning actuator configured to permit the common tuning of a resonant frequency of the plurality of resonator beams.
1 more element
Dependencies are inferred from the claim text.