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US 2014/0197859 A1Published application
Probe Head
AssigneeMpi Corporation
InventorsHorng- Kuang FAN, Hsien-Ta HSU
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Abstract
A probe head includes a plate, a probe, and at least one composite coating layer. The plate has at least one through hole therein. The probe is at least partially disposed in the through hole of the plate. The composite coating layer includes a metal layer and a plurality of lubricating particles. The metal layer is disposed in the through hole of the plate and between the plate and the probe. The lubricating particles are dispersed in the metal layer.
Claims20
A probe head, comprising:
- a plate having at least one through hole therein;
- a probe at least partially disposed in the through hole of the plate;
- and
- at least one composite coating layer comprising:
- a metal layer disposed in the through hole of the plate and between the plate and the probe;
- and
- a plurality of lubricating particles dispersed in the metal layer.
4 more elements
Dependencies are inferred from the claim text.