XMR-Sensor and Method for Manufacturing the XMR-Sensor
AssigneeInfineon Technologies AG
InventorJuergen Zimmer
Life of this patent
Estimating the term…
Abstract
An XMR-sensor and method for manufacturing the XMR-Sensor are provided. The XMR-sensor includes a substrate, a first contact, a second contact and an XMR-structure. The substrate includes a first main surface area and a second main surface area. The first contact is arranged at the first main surface area and the second contact is arranged at the second main surface area. The XMR-structure extends from the first contact to the second contact such that an XMR-plane of the XMR-structure is arranged along a first direction perpendicular to the first main surface area or the second main surface area.
Claims29
An XMR-sensor, comprising:
- a substrate having a first main surface area and a second, different main surface area;
- an XMR-structure comprising at least one section that extends along a first direction perpendicular to the first main surface area or the second main surface area such that an XMR-plane of the XMR-structure is arranged in the first direction;
- and
- a first contact and a second contact arranged to contact the at least one section of the XMR-structure at different locations of the XMR-structure.
A bridge circuit comprising a first bridge section having a series connection of a first XMR-sensor and a second XMR-sensor, and a second bridge section having a series connection of a third XMR-sensor and fourth XMR-sensor, wherein each of the first, second, third and fourth XMR-sensors comprises:
- a substrate area having a first main surface area and a second, different main surface area;
- an XMR-structure comprising at least one section that extends along a first direction perpendicular to the first main surface area and the second main surface area, such that an XMR-plane of the XMR-structure is arranged in the first direction and in a second direction perpendicular to the first direction;
- and
- a first contact and a second contact arranged to contact the at least one section of the XMR-structure at different locations of the XMR-structure.
A method for manufacturing an XMR-sensor, the method comprising:
- providing a substrate having a first main surface area and a second, different main surface area;
- providing an XMR-structure comprising at least one section that extends along a first direction perpendicular to the first main surface area or the second main surface area such that an XMR-plane of the XMR-structure is arranged in the first direction;
- and
- providing a first contact and a second contact arranged to contact the at least one section of the XMR-structure at different locations of the XMR-structure.
Dependencies are inferred from the claim text.