Apparatus and method for multiplexed multiple discharge plasma produced sources

An apparatus for producing extreme ultra-violet (EUV) light, comprising:

• a plate including a first plurality of through-bores, each through-bore included in the first plurality of through-bores including a respective longitudinal axis;
• a plurality of discharge plasma devices, each discharge plasma device at least partially disposed in a respective through-bore included in the first plurality of through-bores and including:
• a respective plasma electrode at least partially forming a respective plasma-producing region;
• a respective magnetic core:
• embedded in the plate;
• aligned with at least a portion of the respective plasma electrode in a radial direction orthogonal to the respective longitudinal axis;
• wholly surrounding the at least a portion of the respective first electrode in a circumferential direction;
• and,
• configured to create a respective magnetic field within the respective plasma-producing region;
• and,
• a respective feed system arranged to supply an ionizable material to the respective plasma-producing region;
• at least one power system configured to supply electrical power to the respective plasma electrodes to create respective first electric fields in the respective plasma-producing regions;
• and,
• a control system configured to operate the at least one power system to:
• simultaneously provide electrical power to all of the respective plasma electrodes;
• or,
• provide electrical power to the respective plasma electrodes in a predetermined sequence, wherein:
• for said each discharge plasma device, the combination of a respective first electric field and the respective magnetic field is arranged to create a respective plasma from the ionizable material, the respective plasma creating respective EUV light.

A method for producing extreme ultra-violet (EUV) light, using an apparatus including a plate including a first plurality of through-bores, each through-bore included in the first plurality of through-bores including a respective longitudinal axis and a first plurality of discharge plasma devices, each discharge plasma device at least partially disposed in a respective through-bore included in the first plurality of through-bores and including a respective plasma electrode at least partially forming a respective plasma-producing region, the method comprising, for said each discharge plasma device:

• creating, using a respective magnetic core embedded in the plate and aligned with at least a portion of the respective plasma electrode in a radial direction orthogonal to the respective longitudinal axis, a respective magnetic field within the respective plasma-producing region;
• supplying, using a respective feed system, an ionizable material to the respective plasma-producing region;
• supplying, using at least one power system, electrical power to the respective plasma electrodes;
• creating respective first electric fields in the respective plasma-producing regions;
• ionizing the ionizable material to the respective plasma-producing regions;
• creating, from the ionizable material, respective plasma in the respective plasma-producing regions;
• and,
• creating, from the respective plasma, respective EUV light.