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AssigneesFraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V., Ushio Denki Kabushiki Kaisha
InventorsKLAUS BERGMANN, RALF PRUEMMER
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The present invention relates to a method for improving the wettability of a rotating electrode with a liquid medium in a discharge lamp, in particular for the production of EUV radiation or soft X-rays, and a correspondingly designed gas discharge lamp. In the method, the edge surface of the rotating electrode to which the liquid medium is applied is microstructured by means of external processing. This microstructure significantly improves the wettability of the edge surface for the liquid medium. Furthermore, the distribution of the liquid medium over the edge surface can be controlled selectively by suitable choice of the microstructure.
Method for improving the wettability of a rotating electrode with a liquid medium in a gas discharge lamp, in particular for generating EUV radiation or soft X-rays, in which the liquid medium is applied to an edge surface of the rotating electrode, characterized in that the edge surface of the electrode is microstructured by means of external processing.
Apparatus for generating radiation by an electrically operated discharge, in particular for generating EUV radiation or soft X-rays, having two electrodes separated by a small distance to form a discharge path, and at least one electrode of which is mounted such that it can be rotated about an axis, and having a device for applying a liquid medium to an edge surface of the at least one electrode characterized in that the edge surface has a microstructure produced by external processing.
Dependencies are inferred from the claim text.