Resonant transducer and manufacturing method of resonant transducer
AssigneeYokogawa Electric Corporation
InventorsTakashi YOSHIDA, Shigeto IWAI, Yoshitaka SASAKI
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Abstract
A resonant transducer includes a resonator, a resonator electrodes connected to an end part of the resonator, at least one fixed electrode arranged in the vicinity of the resonator, and a buried part formed between the fixed electrode and the resonator electrode. The resonator, the resonator electrodes and the fixed electrode are formed by the same active layer on a substrate.
Claims12
A resonant transducer comprising:
- a resonator;
- a resonator electrode connected to an end part of the resonator;
- a fixed electrode arranged in the vicinity of the resonator;
- and
- a buried part formed between the fixed electrode and the resonator electrode,
- wherein the resonator, the resonator electrode and the fixed electrode are formed by the same active layer on a substrate.
A resonant transducer comprising:
- a resonator;
- a resonator electrode connected to an end part of the resonator;
- a fixed electrode arranged in the vicinity of the resonator;
- an outer peripheral electrode arranged in outer peripheries of the resonator electrode and the fixed electrode;
- and
- a buried part formed between any of the electrodes,
- wherein the resonator, the resonator electrode, the fixed electrode and outer peripheral electrode are formed by the same active layer on a substrate.
A method of manufacturing a resonant transducer including a resonator, a resonator electrode connected to an end part of the resonator and a fixed electrode arranged in the vicinity of the resonator, which are formed by the same active layer on a substrate, the method comprising:
- burying polysilicon in parts between the fixed electrode and the resonator electrode;
- and
- etching a sacrifice layer to release the resonator.
A method of manufacturing a resonant transducer including a resonator, a resonator electrode connected to end parts of the resonator, a fixed electrode arranged in the vicinity of the resonator and an outer peripheral electrode arranged in outer peripheries of the resonator electrode and the fixed electrode, which are formed by the same active layer on a substrate, the method comprising:
- burying polysilicon in parts between any of the electrodes;
- and
- etching a sacrifice layer to release the resonator.
Dependencies are inferred from the claim text.