Substrate gripping apparatus

A substrate gripping apparatus, comprising:

• a base;
• a plurality of support posts which are supported by the base and are vertically movable relative to the base;
• a lifting mechanism configured to lift the support posts;
• and
• a substrate holder and a substrate guide member mounted to each of the support posts,
• each of the support posts including a relative movement mechanism configured to move the substrate holder and the substrate guide member relative to each other,
• the relative movement mechanism being configured
• to move the substrate holder in such a direction that the substrate holder releases a peripheral portion of a substrate, while raising the substrate guide member relative to the substrate holder, when the support post moves upward, and
• to move the substrate holder in such a direction that the substrate holder grips the peripheral portion of the substrate, while lowering the substrate guide member relative to the substrate holder, when the support post moves downward.