Mold, mold manufacturing method and method for manufacturing anti-reflection film using the mold
AssigneeSharp Kabushiki Kaisha
InventorsAkinobu ISURUGI, Kiyoshi MINOURA
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Abstract
A mold of at least one embodiment of the present invention includes: a base; a conductive layer provided on the base; and an anodized film provided on the conductive layer, the anodized film having an inverted motheye structure in its surface, the inverted motheye structure having a plurality of recessed portions whose two-dimensional size viewed in a direction normal to the surface is not less than 10 nm and less than 500 nm, wherein the base, the conductive layer, and the anodized film are capable of transmitting ultraviolet light.
Claims12
1-6. (canceled)
A method of fabricating a mold that has an inverted motheye structure in its surface, the inverted motheye structure having a plurality of recessed portions whose two-dimensional size viewed in a direction normal to the surface is not less than 10 nm and less than 500 nm, the method comprising the steps of:
- (a) providing a base which is capable of transmitting ultraviolet light;
- (b) forming on the base a conductive layer which is capable of transmitting ultraviolet light;
- (c) depositing an aluminum film on the conductive layer;
- and
- (d) anodizing an entirety of the aluminum film, step (d) including
- (d1) anodizing the aluminum film to form a porous alumina layer which has a plurality of very small recessed portions,
- (d2) after step (d1), bringing the porous alumina layer into contact with an etchant, thereby enlarging the plurality of very small recessed portions of the porous alumina layer, and
- (d3) after step (d2), further anodizing the aluminum film to grow the plurality of very small recessed portions.
Dependencies are inferred from the claim text.