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US 2014/0197502 A1Published application
Comb MEMS Device and Method of Making a Comb MEMS Device
AssigneeInfineon Technologies AG
InventorAlfons Dehe
Life of this patent
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Abstract
A MEMS device and a method to manufacture a MEMS device are disclosed. An embodiment includes forming trenches in a first main surface of a substrate, forming conductive fingers by forming a conductive material in the trenches and forming an opening from a second main surface of the substrate thereby exposing the conductive fingers, the second main surface opposite the first main surface.
Claims30
A method for making a MEMS device, the method comprising:
- forming trenches in a first main surface of a substrate;
- forming conductive fingers by forming a conductive material in the trenches;
- and
- forming an opening from a second main surface of the substrate thereby exposing the conductive fingers, the second main surface opposite to the first main surface.
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19-34. (canceled)
A method of forming a MEMS device, the method comprising:
- forming a stator comprising a first set of fingers;
- forming a movable element comprising a second set of fingers, wherein the first set of fingers and the second set of fingers are interdigitated;
- and
- forming an anti-sticking mechanism between the first set of fingers and the second set of fingers.
1 more element
Dependencies are inferred from the claim text.